Steps in Photolithography
- Substrate Cleaning
- Photoresist Covering
- Soft Bake
- Mask Alignment
- Exposure
- Post-Exposure Bake
- Development
- Hard Bake
- Etching or Implantation
- Photoresist Stripping
1. Substrate Cleaning: The substrate (typically a silicon wafer) is cleaned to eliminate pollutants.
2. Photoresist Covering: A slight layer of photoresist is turned covered onto the substrate, making an even surface.
3. Soft Bake: In order to eliminate solvent and guarantee uniformity, the coated substrate is gently heated.
4. Mask Alignment: Over the substrate, a photomask with the desired pattern is aligned.
5. Exposure: UV light is radiated through the veil onto the photoresist, causing a substance change.
6. Post-Exposure Bake: The substrate is warmed again to balance out the example in the photoresist.
7. Development: Using a developer solution, the exposed photoresist is removed, revealing the pattern.
8. Hard Bake: The remaining photoresist is made more durable by performing a final heating step.
9. Etching or Implantation: The uncovered substrate regions are carved or adjusted depending on the situation.
10. Photoresist Stripping: The patterned substrate is left behind after the remaining photoresist is removed.
What is Photolithography?
For making perplexing examples on silicon wafers, photolithography is an urgent assembling process. It includes keeping a photosensitive material, called a photoresist, on the wafer’s surface. The resist-coated wafer is covered with a pattern-covered mask, which is illuminated by ultraviolet light.
The resist’s solubility is altered as a result of a chemical reaction brought on by the light’s selective exposure. The resulting improvement eliminates either the uncovered or unexposed districts, abandoning the ideal example. This cycle is rehashed on numerous occasions to make complex coordinated circuits that power our cutting-edge innovation.
- What is Photolithography?
- Photolithography Process
- Steps in Photolithography
- What is Photoresist in Photolithography?
- Types of Photoresist